Quartz glass for photolithography

Quartz glass for photolithography

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Quartz Glass

The quartz glass is a monocomponent molten glass that fused by SiO2, it has high transmission in the range of the UV, the visible light, the near-infrared light, as well as the high temperature resistance, the corrosion resistance. It is essential optical material for the highly stabilized optical systems under varying environmental conditions. With the professional production and development skills, SIKOTY can make optical components, prisms, lenses, and so on, which vary in shape and size, to meet our customer's requirement in regard to the technology. We have experience and technology in making special-purpose quartz glass for National projects. we can make big size quartz glass plate according to the customer’s special request.


Types and Performance of the Quartz Glass:

. Regular types and performances of the quartz glass

Name

Type /

Original Type

Spectrum Range

Metal Impurity

（≤ppm）

OH（ppm）

EUV quartz glass

ZS-1/JGS1

185～2500nm

5

﹥300

UV quartz glass

ZS-2/JGS2

220～2500nm

50

200～300

IR quartz glass

HS/JGS3

260～3500nm

500

5～10



. Optical performance

Classes

nd

(He587.5nm)

nF

(H486.13nm)

nC

(H656.27nm)

nF-nC

Vd=

(nd-1)/nF-nC

Crystal quartz glass

1.45857

1.46324

1.45646

0.00678

67.6

Synthetic quartz glass

1.45847

1.46314

1.45637

0.00677

67.7

4. The highest class attainable.

Name

Bubble Classes

Spectrum property

(Average transmission)

Double refraction

    Grain structure


Stripe

Homogeneity

Luminescence

Radiation resistance

ZS-1

0

180-2500nm

1-2

1

1-2

1-2

1

Nondiscolouring

﹥90%

ZS-2

2

200-2500nm

1-2

2

1-2

2

2

Little

Discoloration

﹥85%

HS

1

260-3500nm

1-2

2

1-2

2

2

Discoloration

﹥85%



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